Semiconductor process equipment

High purity graphite tools in semiconductor, compound semiconductor and PV industry

Epitaxy and MOCVD

For thin film deposition phases such as epitaxy or MOCVD, Mersen supplies ultra-pure graphiteequipment used to support substrates or "wafers". At the core of the process, this equipment, epitaxy susceptors or satellite platforms for the MOCVD, are first subjected to the deposition environment:

  • High temperature.
  • High vacuum.
  • Use of aggressive gaseous precursors.
  • Zero contamination, absence of peeling.
  • Resistance to strong acids during cleaning operations